Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices - Softcover

Hilleringmann, Ulrich

 
9783658410407: Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
Softcover
ISBN 10: 365841040X ISBN 13: 9783658410407
Verlag: Springer-Verlag GmbH, 2023

Inhaltsangabe

The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer’s view.

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Über die Autorin bzw. den Autor

About the Author

Prof. Dr.-Ing. Ulrich Hilleringmann has been teaching semiconductor technology, microelectromechanical systems, sensor technology and optoelectronic system integration since 1989.


Von der hinteren Coverseite

The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer’s view.


The Content

  • Wafer fabrication
  • Thermal oxidation
  • Lithography
  • Etching technology
  • Doping techniques
  • Chemical and Physical Deposition
  • Metallization and Contacts


About the Author
Prof. Dr.-Ing. Ulrich Hilleringmann has been teaching semiconductor technology, microelectromechanical systems, sensor technology and optoelectronic system integration since 1989


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Verlag
Springer-Verlag GmbH
Erscheinungsdatum
2023
Sprache
Englisch
ISBN 10 
365841040X
ISBN 13 
9783658410407
Einband
Tapa blanda
Auflage
1
Anzahl der Seiten
276
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
CMN Printpool Inh. Mathis Neumann
https://www.also.com/ec/cms5/en_6000/6000/index.jsp

Friedrich-Karl-Str. 9
Hamburg
Deutschland

Weitere beliebte Ausgaben desselben Titels

9783658410421: Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices

Vorgestellte Ausgabe

ISBN 10:  3658410426 ISBN 13:  9783658410421
Verlag: Springer Vieweg, 2023
Softcover